http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100614530-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-505 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
| filingDate | 2004-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100614530-B1 |
| titleOfInvention | Plasma vacuum coating device and coating method |
| abstract | In the plasma vacuum coating apparatus of the present invention, a coating method using a plasma vacuum coating apparatus in which two targets for magnetron deposition and arc plasma deposition are mounted in a chamber, the foreign matter adhering to the surface of the deposit to be deposited is removed. Surface cleaning process; Ion washing process in which the deposit is placed in a chamber, placed in a cradle, the chamber is evacuated to high vacuum, and then argon gas is injected through the cavity of the ion rod and ionized to a strong voltage to form an ion coating on the surface of the deposit. ; A magnetron deposition process of applying a bias voltage to the magnetic field generating unit in an argon atmosphere and providing metal ions of the reaction plate ionized by glow discharge into the chamber through the magnetic field reached from the magnetic field generating unit and depositing the deposited material on the deposit; An arc plasma deposition process after depositing the magnetron, providing a compound of titanium (Ti) ions evaporated by an arc discharge through an impact of an electron beam and a reaction gas injected through a reaction gas inlet into a chamber to deposit the deposit on the deposit; Characterized in that it comprises a.n n n n Deposition, plasma |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101122525-B1 |
| priorityDate | 2004-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.