http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100603700-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2003-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100603700-B1 |
| titleOfInvention | Method to Enhance Resolution of a Chemically Amplified Photoresist |
| abstract | The present invention provides a method of forming a relief image of a chemically amplified photoresist on a substrate (the relief image includes features of a first dimension) and converting the first dimension of the relief image to a second dimension. A method of improving the resolution of a chemically amplified photoresist comprising contacting said relief image with an aqueous acidic solution for a time effective to reduce. |
| priorityDate | 2002-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.