http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100599358-B1

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513
filingDate 2004-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2006-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100599358-B1
titleOfInvention Metal surface treatment method and apparatus for improving hydrophobicity
abstract The present invention relates to a method and apparatus for treating a surface of a three-dimensional material made of metal by plasma ion implantation and heat treatment to improve the hydrophobicity of the surface. The method according to the invention comprises the steps of placing a metal sample on a conductive sample bed located in a vacuum chamber, introducing a plasma source gas into the vacuum chamber, generating a plasma from the introduced plasma source gas, and detecting a negative high voltage pulse. In addition to the metal material, the step of allowing the ions extracted from the plasma to be injected into the surface of the sample having a high energy, and the step of raising the temperature of the sample after the ion implantation, and heat treatment.n n n n Plasma ion implantation, heat treatment, metal, hydrophobic, three-dimensional structure
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101192405-B1
priorityDate 2004-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 39.