http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100597449-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
filingDate | 1999-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2006-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2006-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-100597449-B1 |
titleOfInvention | Polishing liquid material for metal, polishing liquid for metal, method for producing same and polishing method using same |
abstract | The present invention provides an oxidizing agent, a metal oxide dissolving agent, a protective film forming agent, a dissolving aid for the protective film forming agent and a polishing liquid for metal containing water, a manufacturing method thereof, and a polishing method using the same. Moreover, as a material for manufacturing this metal polishing liquid, this invention provides the metal polishing liquid material containing a metal oxide dissolving agent, a protective film forming agent, and the dissolution support agent of the said protective film forming agent. |
priorityDate | 1998-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 260.