http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100597039-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0335 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F41B11-62 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30 |
| filingDate | 2004-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100597039-B1 |
| titleOfInvention | Static and dynamic radially transverse electron polarizer devices, lithographic projection apparatus and methods for manufacturing the same for high numerical aperture systems |
| abstract | A radial transverse electric polarizer includes a first layer of material having a first refractive index; A second layer of material having a second refractive index; And a plurality of elongated elements that are periodically spaced at azimuth and are disposed between the first layer and the second layer. The plurality of elongated elements interact with the electromagnetic waves of the radiation to transmit transverse electrical polarization of the electromagnetic waves of the radiation. Polarizer devices can be used, for example, in lithographic projection apparatus to increase the imaging resolution. The device manufacturing method includes polarizing the radiation beam with transverse electrical polarization. |
| priorityDate | 2004-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.