| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D2101-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D2101-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8671
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D3-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D3-20 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D101-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D101-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D3-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86 |
| filingDate |
1998-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100596106-B1 |
| titleOfInvention |
Method for the Decomposition Treatment of Fluorine Containing Compounds, Catalysts and Apparatus for the Decomposition Treatment |
| abstract |
The present invention is a method for decomposing and treating fluorine compounds containing only fluorine as halogen at low temperature with good efficiency, such as CF 4 , C 2 F 6 , SF 6 , NF 3 , decomposition catalyst and decomposition treatment with high decomposition rate and long catalyst life. Provide the device.n n n According to the present invention, a fluorine compound containing only fluorine as halogen can be treated with good efficiency. |
| priorityDate |
1997-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |