http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100594768-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-118 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D213-643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D498-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D409-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D471-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C229-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1999-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100594768-B1 |
| titleOfInvention | Positive photosensitive composition |
| abstract | It is an object of the present invention to provide a positive photosensitive composition suitable for use with exposure having a wavelength of up to 250 nm, in particular up to 220 nm. The positive photosensitive composition has (A) a compound which generates an acid upon irradiation with active light or radiation, (B) at least a monovalent polycyclic alicyclic group represented by one of the following formulas (I), (II) and (III), (C) a compound having a group further decomposed by the action of an acid to increase the solubility of the resin in an alkaline developer, and (C) a compound represented by the formula (CI) or (CII) or one or more hydrophilic functional groups and 5 to 30 carbon sources Low molecular weight compounds containing internally crosslinked hydrocarbon groups having a molecule or naphthalene compound (ii) having at least one hydrophilic functional group and 10 to 30 carbon atoms;n n n n n n n n (Here, the substituents are the same as those described herein.) |
| priorityDate | 1998-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 735.