http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100591179-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1089 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76865 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2004-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100591179-B1 |
| titleOfInvention | Metal wiring formation method of semiconductor device |
| abstract | Stacking a first etch stop film, an interlayer insulating film, a second etch stop film, and a wiring insulating film on a semiconductor substrate having a predetermined substructure, forming a contact hole pattern on the wiring insulating film, and exposing the contact hole pattern as a mask. Etching the formed wiring insulating film, the first etch stop film, and the interlayer insulating film to form a contact hole, removing the contact hole pattern, and then forming a trench pattern on the wiring insulating film, and using the trench pattern as a mask. Etching to form a trench, removing the trench pattern, removing the exposed first etch stop layer and the second etch stop layer, forming a first metal thin film in the contact hole and the trench, and forming the first metal thin film. And forming a second metal thin film thereon.n n n n Metal thin film, metal wiring, metal seed film |
| priorityDate | 2004-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.