http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100586543-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100586543-B1 |
| titleOfInvention | Organic antireflection film polymer, preparation method thereof and antireflection film composition containing the same |
| abstract | The present invention relates to an organic antireflection film polymer used in an ultrafine pattern forming process of a photoresist, a method for preparing the same, and an antireflection film composition containing the same, wherein the antireflection film is overcoated on top of the photoresist to minimize reflectance on the top of the photoresist. The present invention relates to an organic antireflection film polymer, a method for manufacturing the same, and an antireflection film composition containing the same, which can prevent the photoresist pattern from collapsing due to diffuse reflection. Such an organic antireflection film polymer of the present invention has a structure represented by the following Chemical Formula 1.n n n [Formula 1]n n n n n n n n In the above formula, a, b, c are mole fractions of each monomer, b represents 0.01 to 0.1, and a, c represents 0.1 to 0.9, respectively.n n n n Organic antireflection film, overcoating, reflectivity, refractive index, water soluble |
| priorityDate | 2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.