http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100586542-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F230-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F230-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-76 |
| filingDate | 2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100586542-B1 |
| titleOfInvention | Upper antireflection film polymer, preparation method thereof and antireflection film composition comprising the same |
| abstract | The present invention is introduced to the top of the photoresist in the ultrafine pattern forming process of the photoresist for lithography using a 193 nm ArF or 157 nm VUV light source, and the like, an organic antireflection film polymer having a structure of the formula (1), the preparation thereof The present invention relates to a method and an antireflective coating composition comprising the same, and in particular, to protect a photoresist from an amine, thereby improving post-exposure delay stability and minimizing pattern distortion due to a swing phenomenon during pattern formation. An organic antireflection film polymer, a method for producing the same, and an antireflection film composition containing the same.n n n [Formula 1]n n n n n n n n Wherein n and m are integers of 5-5,000.n n n n Photoresist, organic antireflective film, amine, swing, diffuse reflection, post-exposure extension |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102230712-B1 |
| priorityDate | 2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 63.