http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100577958-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-108 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-02 |
| filingDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100577958-B1 |
| titleOfInvention | Method for Purifying Nitrogen Trifluoride Gas Using Zeolite 5A Ion-Exchanged with Alkaline Earth Metal |
| abstract | The present invention relates to a method for purifying nitrogen trifluoride gas and an adsorbent used therein, wherein the carbon tetrafluoride (I) is ion-exchanged with alkaline earth metal and heated through a column filled with zeolite 5A heated at 150 to 600 ° C. for 30 minutes to 100 hours. Nitrogen trifluoride adsorbent comprising a zeolite 5A and a method for purifying nitrogen trifluoride gas comprising the step of venting nitrogen trifluoride (NF 3 ) gas containing CF 4 ) to selectively adsorb only nitrogen trifluoride. It is about.n n n Nitrogen trifluoride, NF3, carbon tetrafluoride, CF4, zeolite, zeolite 5A, ion exchange |
| priorityDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 86.