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filingDate 2002-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2006-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100576261-B1
titleOfInvention Ruthenium Silicide Wet Etch
abstract A method for removing ruthenium silicide from a substrate surface comprising exposing the ruthenium silicide surface to a solution comprising chlorine and fluorine containing chemicals. In more detail, the solution is designed to react with the ruthenium silicide membrane to form a water soluble reaction product.n n n n Ruthenium Silicide, Hypochlorite, Hydrofluoric Acid, Substrate
priorityDate 2001-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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