http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100573672-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-124 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2000-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100573672-B1 |
| titleOfInvention | Method of forming resist structure |
| abstract | The present invention relates to a method of forming a negative resist structure. Chemically strengthened resist is provided on the substrate according to the method, dried, exposed by light, X-rays, electron beams or ion beams, heated, developed by an aqueous-alkali developer and silylated from the liquid phase. The resist contains the following components: a polymer in which the polarity is altered by the action of an acid and optionally comprises a latent form of carboxylic anhydride group; Compounds which release acid by heat treatment; Photoactive compounds which generate bases upon exposure by light, X-rays, electron beams or ion beams; solvent; In some cases, one or more additives. |
| priorityDate | 1999-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 74.