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filingDate 2003-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be0022293ddaed90696314e6c024c6e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a87144c64825b4d25362f09c622c8b9
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publicationDate 2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100566537-B1
titleOfInvention Copper Metal Grinding Slurry
abstract The present invention relates to a copper polishing slurry containing silica abrasive, oxidizing agent, amino acid, triazole compound and water, wherein the content ratio of amino acid to the triazole compound (amino acid / triazole compound (weight ratio)) Is 5 to 8.n n n n Abrasive slurry, dishing, CMP, triazole compound, amino acid,
priorityDate 2002-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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