| abstract |
The present invention provides a wet deposition process such as droplet chemical vapor deposition equipped with a shade driven in one direction to produce thin film and powder arrays having various compositions in a reactor on a wafer or in a hole punched by the number of samples to be manufactured. Characterized in that. Materials of varying composition are transported in a predetermined area by a mask on the wafer to form an array with at least 16 to 20,000 different compositions by mixing or reacting at least two or more materials in a liquid state. Through this, the development of materials for various applications ranging from ferroelectric materials, inorganic materials including phosphors, organic polymers, organometallic materials, ionic solids, and metal alloys can be performed more efficiently than the current experimental method. It includes the development of arrays with the various compositions mentioned above, as well as how to characterize them in a short time. |