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filingDate 2003-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2006-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100559562-B1
titleOfInvention Low dielectric constant insulating film forming material, low dielectric constant insulating film, low dielectric constant insulating film formation method and semiconductor device
abstract The present invention is intended to improve the mechanical strength of a low dielectric constant insulating film made of a porous film.n n n The solution for forming the low dielectric constant insulating film includes a silicon resin 2, fine particles 3 mainly composed of silicon atoms and oxygen atoms, having a plurality of pores, and a solvent 4.n n n n Porogen, porous membrane
priorityDate 2002-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 61.