http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100558553-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0693 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67288 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2004-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100558553-B1 |
| titleOfInvention | Pollution state monitoring device of semiconductor manufacturing facility |
| abstract | The present invention relates to an apparatus for monitoring a contamination state of a semiconductor manufacturing facility which automatically detects a deposition state of a polymer on an inner wall of a process chamber and generates an interlock when it is contaminated.n n n The pollution state monitoring apparatus of the semiconductor manufacturing equipment of the present invention for this purpose, the first and second transparent windows are formed symmetrically on both side walls of the process chamber and formed to transmit light, and installed in the first transparent window has a straightness A light emitting sensor for generating light, a light receiving sensor installed in the second transparent window to receive the light generated by the light emitting sensor, and receiving a voltage sensed by the light receiving sensor to determine a contamination state inside the process chamber. It includes a controller that generates a signal.n n n n Polymer Deposition, Process Chamber Cleaning, Foreign Object Detection, Particles |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150138974-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102275077-B1 |
| priorityDate | 2004-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.