http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100553422-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00 |
| filingDate | 2003-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100553422-B1 |
| titleOfInvention | Chemical processing device and chemical processing method |
| abstract | The chemical liquid processing apparatus of the present invention is a chemical liquid processing apparatus for performing chemical liquid treatment on a surface to be treated such as a wafer by supplying a chemical liquid through a cell, wherein the cell is mounted on a cylindrical inner cell and an outer side of the inner cell, It consists of an open cylindrical outer cell. The outer cell is movable in the axial direction, and the discharge of the chemical liquid is adjusted by arbitrarily varying the width of the slit formed between the lower end of the outer cell and the upper surface of the substrate holding means by the axial movement. Fluctuate pressure; Rapid supply and replacement of chemical liquids in through holes, non-penetrating holes or grooves is realized.n n n Even in the case of the through-hole, the non-penetrating hole and the groove having a small internal diameter and the smallest diameter formed on the substrate, the chemical liquid can be supplied and exchanged quickly, and the chemical liquid treatment of high quality can be performed. have. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200134633-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102229904-B1 |
| priorityDate | 2002-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.