http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100550338-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2003-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100550338-B1 |
| titleOfInvention | Thin film deposition method and thin film structure of wafer manufactured thereby |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film deposition method and a thin film structure of a wafer manufactured therein, wherein a step of depositing a thin film containing an Hf element on a wafer (w) is performed. And a pretreatment step of forming a barrier film on the wafer w so as not to. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210068870-A |
| priorityDate | 2003-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.