http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100548613-B1

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filingDate 2003-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2006-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100548613-B1
titleOfInvention Blu-ray light receiving element and manufacturing method
abstract The present invention relates to a light-receiving element for a Blu-ray and a method of manufacturing the same; A p + barrier layer (PBL) formed by being buried in the substrate to a predetermined thickness and serving as an anode to which power is supplied from the outside; A p-type epitaxial layer formed on the p + barrier layer by epitaxial growth and having a depletion layer region generating an electron-hole pair (EHP) in response to light energy incident from the outside; A p + well layer formed by ion implanting impurities into a predetermined region formed by a masking process on the p-type epitaxial layer and performing electrical connection with the p + barrier layer; A polysilicon layer formed by depositing polysilicon on a predetermined window region formed by performing window etching on an oxide layer formed by an oxidation process on the p-type epitaxial layer; Implanting predetermined impurity ions on the polysilicon layer and performing heat treatment to diffuse into a predetermined depth of the p-type epitaxial layer, and include n + shallow diffusion layer serving as a cathode for receiving power supplied from the outside. Characterized in that configured.n n n Accordingly, the present invention has an effect of increasing the photoelectric conversion efficiency by easily receiving a Blu-ray having a short wavelength having a short penetration depth by forming a junction depth of the light receiving element in a shallow manner.n n n In addition, by configuring the polysilicon layer to be used as an external electrode, the present invention also provides an effect that the manufacturing process can be simplified since a process for forming a separate external electrode is not necessary.n n n n Substrate, barrier layer, epitaxial layer, well layer, oxide layer, polysilicon layer, external electrode, shallow diffusion layer, impurity, implant.
priorityDate 2003-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 32.