| abstract |
The present invention relates to a plastic microstructure applicable to a biochip, a micro heater, micro reactor, micro reactor array and micro array using the same. A plastic structure is provided to provide a heating zone with a thin-walled insulating plastic having a surface flatness to which the photolithography process is possible, thermal isolation in part or whole, and low thermal mass. A micro heater is formed by forming heating means, a temperature sensor for sensing a temperature, an electrode, and an electrode pad on a heating area of the plastic structure. According to the present invention, the device can be easily manufactured at low cost, and since the heating region is formed of a plastic thin film, uniform temperature control is possible even at low power, and various samples can be rapidly heat treated to react and analyze. |