http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100524446-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1999-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100524446-B1 |
| titleOfInvention | Positive-working photoresist composition |
| abstract | The present invention provides an excellent chemically amplified positive photoresist composition that exhibits excellent dimensional stability over high resolution and with time, and does not generate residual residue (scum) and standing waves, and has a low single pattern loss. The new positive type photoresist composition is (a) a copolymer having one or more structural units represented by the following formulas (I), (II) and (III) A, (b) a compound which generates an acid upon actinic radiation or irradiation , And (c) a solvent comprising:n n n n n n n n (Wherein R 1 and R 2 each independently represent a hydrogen atom or a methyl group; R 3 represents a tertiary alkyl group or tertiary cycloalkyl group which may be substituted; X represents a divalent organic residue.) |
| priorityDate | 1998-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 313.