http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100519405-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-68 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-753 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L67-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G63-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-013 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-608 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-732 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-675 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-753 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-00 |
| filingDate | 2000-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100519405-B1 |
| titleOfInvention | Novel Ester Compounds |
| abstract | An ester compound represented by the following formula (1) or an enantiomer thereof.n n n n n n n n n n In the above formula, R 1 represents an n-valent hydrocarbon group having 4 to 40 carbon atoms having a saturated alicyclic structure or an aromatic ring structure which may include a hetero atom, and R 2 represents a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms. Or an aryl group which may be substituted with 6 to 20 carbon atoms, R 3 to R 12 may each independently represent a monovalent hydrocarbon group which may include a hydrogen atom or a hetero atom having 1 to 15 carbon atoms, and may form a ring with each other; In this case, a divalent hydrocarbon group having 1 to 15 carbon atoms that may include a hetero atom, R 3 to R 12 may be bonded to adjacent carbons without any intervening to form a double bond and n is an integer of 1-8.n n n Since the resist material which mix | blended the ester compound of this invention is excellent in sensitivity, resolution, etching resistance, and storage stability in response to high energy rays, it is useful for the fine processing by an electron beam or far ultraviolet rays. In particular, since the absorption at the exposure wavelengths of the ArF excimer laser and the KrF excimer laser is small, it is possible to easily form a fine and vertical pattern with respect to the substrate. |
| priorityDate | 1999-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 126.