http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100504135-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-311 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R19-00 |
| filingDate | 1999-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100504135-B1 |
| titleOfInvention | Method and apparatus using an infrared laser probe for measuring voltages directly in an integrated circuit |
| abstract | A method and apparatus for detecting an electric field in an active region 403 of an integrated circuit 405 disposed in a semiconductor is described. In one embodiment, the laser beam 407 is operated at a wavelength greater than about 0.9 microns. The laser beam is focused through the backside of the semiconductor substrate, for example on a P-N junction, such as the drain of a MOS transistor. As a result of free carrier absorption, the laser beam is partially absorbed near the P-N junction. Once the signal is applied on the P-N junction, the free Cair absorbance can be modulated according to the modulation of the depletion region near the P-N junction. The laser beam passes through the P-N junction, reflects off the metal behind the oxide interface and folds, and returns back from the P-N junction and silicon surface. Amplitude modulation in the reflected laser beam is detected by the light detection system. |
| priorityDate | 1998-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 17.