http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100499744-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2601-16 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C39-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C39-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-15 |
| filingDate | 1996-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100499744-B1 |
| titleOfInvention | Positive Resist Composition and Photosensitizer Compound |
| abstract | The present invention relates to a positive photoresist composition comprising a quinonediazide sulfonic acid ester of a phenolic compound represented by the following formula (1) and an alkali-soluble resin as a photosensitizer, and a quinonediazide sulfonic acid ester of a phenolic compound represented by the formula (1).n n n [Chemical Formula 1]n n n n n n n n In this formula,n n n Q 1, Q 2, Q 3 , Q 4, Q 5, Q 6, Q 7, Q 8, Q 9 and Q 10 are independently hydrogen, alkyl or phenyl group having 1 to 6, Q 1 and Q 2, Q 3 and Q 4 , Q 5 and Q 6 , Q 7 and Q 8 or Q 9 and Q 10 together with the carbon atoms to which they are bonded may form a cycloalkane ring having 6 or less carbon atoms,n n n R 1, R 2, R 3 , R 4, R 5, R 6, R 7, R 8, R 9, R 10, R 11, R 12, R 13, R 14, R 15 and R 16 are independently Hydrogen, hydroxyl, alkyl having 1 to 6 carbon atoms or phenyl,n n n m and n are independently an integer of 0 or 1; |
| priorityDate | 1995-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 158.