http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100495847-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06794 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07378 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2001-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100495847-B1 |
| titleOfInvention | Probe contact system having planarity adjustment mechanism |
| abstract | The probe contact system can adjust the distance between the tips of the contacts and the contact targets by a simple and low cost instrument. The planar adjustment mechanism includes a contact substrate having a plurality of contacts mounted on a surface, a probe card for establishing electrical communication between the contacts and the test head of the semiconductor test system, a conductive elastomer provided between the contact substrate and the probe card, A connecting member for connecting the contact substrate and the probe card at three positions on the contact substrate, and for measuring the gap between the contact substrate and the semiconductor wafer, each adjustable to change the distance between the contact substrate and the probe card. And a gap sensor and a rotation adjusting device for adjusting the connecting member such that the gap between the contact substrate and the semiconductor wafer at each of the three positions is equal to each other. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101247523-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011062312-A1 |
| priorityDate | 2000-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.