| abstract |
The present invention relates to a compound (hereinafter referred to as an "acid generator") and a thin film composition containing the same, wherein the compound is decomposed by heat to generate a strong acid, and provides a compound represented by the following general formula (I) and a thin film composition comprising the same do.n n n [Formula I]n n n n n n n n In general formula (I), X is an alkyl group or an aryl group, and R is a hydrogen atom, a hydroxy, alkoxy, or an alkyl group.n n n Since the acid generator of the present invention generates acid by relatively low temperature heat, some components in the composition may be volatilized to prevent the composition ratio from being changed. Therefore, there exists an effect which becomes easy to manufacture the thin film which has the component ratio control of a composition, and a desired characteristic. |