| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1939
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1928 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76259 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2002-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100478685-B1 |
| titleOfInvention |
Separating apparatus and processing method for plate member |
| abstract |
In the separation of a plate member such as a bonded substrate laminate, it is ensured that the fluid is injected into an appropriate position of the plate member. While the bonded substrate laminate 50 is rotated, the vertical direction position of the outer peripheral portion thereof is measured by the measuring device 150 over the entire periphery. Next, based on the measurement results, the vertical position of the nozzle 120 is dynamically adjusted and the bonded substrate laminated body 50 is rotated while injecting fluid ejected from the nozzle 120 to inject the bonded substrate laminated body ( 50) is separated into two substrates in the porous layer. |
| priorityDate |
2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |