http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100466807-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2033-385 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3857 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 |
filingDate | 2001-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2005-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2005-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-100466807-B1 |
titleOfInvention | Method for manufacturing triangular riblet and the mold by using bulk micromachining |
abstract | The present invention relates to a triangular mountain structure using a substrate microfabrication and a manufacturing method of the forming frame, in particular, the first and second insulating films are formed on (100) the upper and lower silicon substrates, respectively, and the triangular mountain structure on the first insulating film After forming a photoresist pattern defining a mountain range region of, forming an etch mask pattern by etching the first insulating film according to the photoresist pattern, the photoresist pattern was removed, and the substrate exposed by the etch mask pattern was used by using a directional wet solution. A triangular valley is formed by substrate microprocessing, and the etching mask pattern and the second insulating layer are removed to form a silicon mold of the triangular mountain structure. After the molding material is poured into the silicone mold of the triangular mountain structure and molded, the solid material is separated from the mold to prepare the triangular mountain structure. In addition, the metal mold for the injection molding, extrusion molding, or hot embossing process can be made with the silicon mold of the triangular mountain structure, so that the mass production of the triangular mountain structure is possible through the above processes. Therefore, the present invention can produce a large amount of flexible fine triangular mountain structure having sharp peaks that can be applied to curved surfaces and the like while efficiently damping drag by using substrate microfabrication technology. |
priorityDate | 2001-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.