http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100449648-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21F9-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21F9-00 |
| filingDate | 1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100449648-B1 |
| titleOfInvention | An effective dry etching process of actinide oxides and their mixed oxides in cf4/o2/n2 plasma |
| abstract | The gas phase etching of actinium oxide from the substrate using plasma power involves preheating and exposing the actinium oxide on the substrate in a processing chamber filled with a fluorine-containing gas and thereby exposing it with plasma power. Etching the actinium oxide from the substrate. |
| priorityDate | 1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.