Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
filingDate |
2002-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2004-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2004-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-100447684-B1 |
titleOfInvention |
Organosilicon precursors for interlayer dielectric films with low dielectric constants |
abstract |
The present invention reacts an organosilicon precursor comprising a silyl ether, silyl ether oligomer, or organosilicon compound containing one or more reactive groups under chemical vapor deposition conditions sufficient to deposit the film on a substrate, resulting in a dielectric constant of 3.5 or A method of forming an interlayer dielectric film having a low dielectric constant on a substrate by forming an interlayer dielectric film less than that is provided. This film is formed by the above method. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023106623-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020290095-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11666950-B2 |
priorityDate |
2001-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |