| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1254 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 |
| filingDate |
2000-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100408517-B1 |
| titleOfInvention |
Manufacturing method for ferroelectric thin film using sol-gel process |
| abstract |
The present invention relates to a method for producing a ferroelectric thin film using a sol-gel process. A method of manufacturing a ferroelectric thin film by a sol-gel process, comprising: dissolving a Pb precursor and stabilizing a Ti precursor and a Zr precursor; Preparing a ferroelectric solution by stirring and hydrolyzing the dissolved Pb precursor, the stabilized Ti precursor, and the Zr precursor; Forming the ferroelectric thin film on the substrate to the ferroelectric solution prepared by providing a method for producing a ferroelectric thin film by a sol-gel process, it can increase the stability and durability of the solution for producing a ferroelectric thin film In addition, it is possible to greatly improve the film quality during thin film manufacturing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100649585-B1 |
| priorityDate |
2000-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |