http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100404951-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D129-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D129-10 |
| filingDate | 1996-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100404951-B1 |
| titleOfInvention | Composition for anti-reflection coating of resist surface |
| abstract | (A) a water-soluble fluorine compound which is in a solid state at 20 ° C and 1 atm, (B) a fluorine-containing water-soluble fluorine compound (B) And a water-soluble fluorine compound having a boiling point of at least 100 ° C under 1 atmospheric pressure in a liquid state at 1 atmospheric pressure. |
| priorityDate | 1995-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.