| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D311-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D315-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F34-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D311-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D315-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F34-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2001-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100403626-B1 |
| titleOfInvention |
Monomers having multi-ring structure, and photosensitive polymers and chemically amplified resist compounds obtained from the same |
| abstract |
Disclosed are a monomer having a polycyclic structure based on an alkenyl ether, a photosensitive polymer which is a polymerization product thereof, and a resist composition comprising the same. The photosensitive polymer according to the present invention includes a monomer unit having the following structure.n n n n n n n n Wherein R 4 and R 5 are each a hydrogen atom or a methyl group, and R 6 and R 7 are each a hydrogen atom, a hydroxyl group, or a C 1 to C 20 hydrocarbon-contained group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100626907-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030055876-A |
| priorityDate |
2001-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |