http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100394876-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01S15-8925 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4444 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01S15-8993 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00 |
| filingDate | 2001-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100394876-B1 |
| titleOfInvention | method of fabricating ultrasonic wave probe |
| abstract | The ultrasonic probe includes a substrate having a CMOS, an insulating layer formed on the substrate, a membrane layer formed on the insulating layer, a lower electrode formed on the membrane layer, a piezoelectric layer formed on the lower electrode, and formed on the piezoelectric layer. Comprising an upper electrode and a bonding layer formed on the upper electrode, it is possible to implement a two-dimensional array (N x M) ultrasonic transducers applied to high-quality three-dimensional ultrasound diagnostics. |
| priorityDate | 2001-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.