| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1995-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100378614-B1 |
| titleOfInvention |
Multilevel interconnect structure with air gaps formed between metal leads |
| abstract |
The present invention relates to a method of forming an air gap 22 between a semiconductor device and metal leads 16 of a semiconductor structure. The metal layer is deposited on the substrate 12. The metal layer is etched to form metal leads 16. The removable solid layer 18 is deposited between the metal leads 16. The porous dielectric layer 20 is deposited on top of the removable solid layer 18 and the lid 16, and the removable solid layer 18 is removed through the porous dielectric layer 20 to remove the metal under the porous dielectric layer 20. An air gap 22 is formed between the leads 16. The air gap has a low dielectric constant, which reduces the sidewall capacitance of the metal lead. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7076596-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7076595-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7076602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150044722-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102065475-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102583706-B1 |
| priorityDate |
1994-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |