http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100376197-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2202-08 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-162 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
| filingDate | 2000-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100376197-B1 |
| titleOfInvention | Low temperature synthesis of carbon nanotubes using metal catalyst layer for decompsing carbon source gas |
| abstract | A low temperature synthesis method of carbon nanotubes using a catalytic metal film is disclosed. According to the present invention, after forming the catalyst metal film on the substrate, the catalyst metal film is etched to form separated nano-sized catalyst metal particles. Subsequently, carbon nanotubes are grown on the substrate by growing carbon nanotubes separated by thermal chemical vapor deposition, which thermally decomposes the carbon source gas at a temperature lower than the deformation temperature of the substrate using a catalytic metal film for carbon source gas decomposition. To form a plurality of aligned carbon nanotubes. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101052614-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100982419-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100407805-B1 |
| priorityDate | 1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.