abstract |
When a creep phenomenon occurs, the mask is stretched to mitigate most of the weighting, causing various problems such as wrinkles and deterioration of vibration characteristics. In particular, when the blackening treatment is performed at high temperature to improve the magnetic characteristics, the creep rate increases.n n n Ni is 34% by mass (%) (hereinafter referred to as%) or more and 45% or less, Mn is 0.01% or more and 0.5% or less, and 0.01, or more, in total of one or two or more of Cu, Nb, Mo, W, and Ta. A Fe-Ni-based alloy for a semi-tension mask, containing 1.5% or less, and having excellent creep characteristics, consisting of residual Fe and unavoidable impurities. |