http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100365061-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-822 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 1998-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100365061-B1 |
| titleOfInvention | Semiconductor device and semiconductor device manufacturing method |
| abstract | The semiconductor device has a continuously varying portion of the first film 44,1032, such as a barrier film used in conductive structures such as interconnects and conductive plugs. The continuously varying portions 44 and 1032 include a first element and a second element, such as a refractory metal and nitrogen. Continuous changes have varying concentrations of the first element closer to the more conductive second films 46, 1054, and 1064. Another semiconductor device includes a first conductive film and a second conductive film 1054 and 1065, which are mostly made of copper. The first conductive film has a first portion, a second portion, and a third portion. The second portion is located between the first portion and the third portion and the third portion is located closest to the second conductive layers 1054 and 1064. The nitrogen concentration of the second portion is greater than the nitrogen concentration of the first portion and the third portion Which is higher than the nitrogen concentration of the semiconductor device. Processes for manufacturing semiconductor devices are also described. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101067364-B1 |
| priorityDate | 1997-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.