http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100359136-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B17-7032 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 |
| filingDate | 2000-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100359136-B1 |
| titleOfInvention | Diamond thin film and bulk formation method by laser ablation combined with high voltage discharge plasma CVD |
| abstract | The present invention further includes the step of enclosing the plasma zone in a reactor to increase plasma density and increase thin film deposition rate efficiency when generating diamond on a substrate under hydrogen gas. The laser beam 2 generated from the (YAG) laser 1 is condensed by the lens 3 and irradiated onto the fixed high purity graphite target 6 which is unnecessary for a separate rotary motor 5 located in the vacuum chamber 4. The generation plasma is formed by combining the ablation phenomenon (laser plume 7) occurring on the surface thereof and the discharge plasma 9 generated between the graphite cathode 6 and the graphite anode 8 at the same time. (9) Plasma when diamonds are formed on the substrate 11 overlying the graphite anode 8 without being heated by a separate substrate heater 10 due to the high temperature at the center. The process of placing the reactor 12 surrounding the zone and supplying a certain amount of hydrogen gas to the guide tube 13 into the reactor 12 located inside the vacuum chamber 4 from the outside, a large amount of atomic hydrogen substrate (11) further characterized in that the step of efficiently exerting its function to form a high quality diamond thin film or bulk. |
| priorityDate | 2000-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.