http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100353385-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-15 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-582 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-581 |
filingDate | 2002-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2002-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2002-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-100353385-B1 |
titleOfInvention | Aluminum Nitride Sintered Body and Method of Preparing the Same |
abstract | The present invention provides an aluminum nitride sintered body which is excellent in thermal shock resistance and strength and is applicable to applications used under strict heating cycles such as heat dissipation substrates for power modules and jigs for semiconductor manufacturing apparatuses. Aluminum nitride sintered body obtained by using rare earth element-alkaline earth element compound as sintering aid, 0.01 to 5% by weight of alkaline earth element compound as its oxide, 0.01 to 10% by weight of rare earth element compound as its oxide In addition, by controlling the amount of carbon remaining in the sintered body to 0.005 to 0.1% by weight, grain growth is suppressed and the thermal shock resistance and strength of the sintered body are improved. |
priorityDate | 1998-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.