http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100348033-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G83-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-22 |
| filingDate | 1996-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100348033-B1 |
| titleOfInvention | Cross-linked polymers, methods of making the same, and radiation-sensitive compositions comprising the same |
| abstract | Polymers containing the structural units of the following general formula (I) in an amount which is insoluble in the aqueous alkaline developer solution and the decomposition products obtained by the reaction with an acid are dissolved in the aqueous alkaline developer solution have high processing stability, high contrast and It is suitable as a binder for DUV photoresist with good resolution.n n n n n n n n Wheren n n R 2 is hydrogen, C 1 -C 18 alkyl, C 5 -C 10 cycloalkyl, C 5 -C 14 aryl or C 6 -C 30 aralkyl (where an alkyl, cycloalkyl, aryl or aralkyl group is necessary May be substituted by one or more hydroxyl groups or nitro groups or by one or more halogen atoms),n n n R 3 is C 1 -C 18 alkyl, C 5 -C 10 cycloalkyl, C 5 -C l4 aryl or C 6 -C 30 aralkyl (where the alkyl, cycloalkyl, aryl or aralkyl group, with respect to R 2 As defined)n n n X is an r + monovalent organic radical,n n n k is a number from 1 to 5,n n n l is a number from 0 to 4. |
| priorityDate | 1995-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 161.