http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100327564-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 |
| filingDate | 1998-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5e4e44289a758c02138a79a86915a53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69adc23d2122f30fae1092568c64466d |
| publicationDate | 2002-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100327564-B1 |
| titleOfInvention | Preparation method for scanning electron microscopy |
| abstract | The present invention observes the formation state of the barrier metal layer, especially the TiN / Ti layer, which is formed to reduce the contact resistance between the metal and the insulating layer or the diffusion layer and prevent the diffusion of the insulating layer when forming the conductive layer by scanning electron microscopy. The present invention relates to a method for fabricating a sample for attaching a portion of a semiconductor device in which a barrier metal layer and an aluminum layer are deposited at a specific polarity, and soaking it in an electrolytic solution to leave only the skeleton of the substance to be observed. The advantage of maximizing the distance between different materials is that the scanning electron microscope can be used to obtain a clear image. |
| priorityDate | 1998-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.