http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100321728-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B69-00 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
| filingDate | 1999-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100321728-B1 |
| titleOfInvention | Method for forming feram by using plasma pulse |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a ferroelectric memory device capable of preventing the deterioration of the characteristics of a ferroelectric due to plasma in an interlayer insulating layer etching process for forming a capacitor contact. The present invention relates to a time modulated plasma, that is, a plasma pulse. Is used to etch an interlayer insulating film covering the capacitor. As a result, etching with less damage can be performed regardless of the process margin considering plasma properties, prevention of deterioration of ferroelectric properties due to etching, omission or shortening of subsequent recovery heat treatment processes, and a simplified process and a device Can improve the reliability. |
| priorityDate | 1999-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.