| abstract |
Disclosed are a photosensitive polymer having a backbone having an annular structure and containing an alicyclic compound, and a resist composition obtained therefrom. The photosensitive polymer which concerns on this invention has a following formula, and a weight average molecular weight is 3,000-100,000.n n n n n n n n In the formula, R 1 is tert-butyl group, tetrahydropyranyl group, 1-alkoxyethyl group, or 1-alkoxymethyl group, R 2 is a hydrogen atom, cyano group (-CN), hydroxy group, hydroxymethyl group, carboxylic acid group, 2-hydroxyethyloxycarbonyl group, tert-butoxycarbonyl group, or an alicyclic compound, R 3 is a hydrogen atom or a methyl group, R 4 is a hydrogen atom, 2-hydroxyethyl group, tert-butyl group, isobornyl group, Adamantyl, norbornyl, or menthyl, l / (l + m + n + p) = 0.1-0.5, m / (l + m + n + p) = 0.3-0.5, n / ( l + m + n + p) = 0.0 to 0.3, and p / (l + m + n + p) = 0.0 to 0.3. |