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filingDate 1998-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2001-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2001-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100278435-B1
titleOfInvention Process improvements for titanium-tungsten etching in the presence of electroplated c4's
abstract The present invention relates to a process and an etching solution for the chemical wet etching of a thin metal film in the presence of a protected metal. The pH of the etching solution is about 2.7 to 4.0. The etching solution includes hydrogen peroxide, potassium sulfate and potassium EDTA, which reduces or eliminates the appearance of etch-resistant metals without damaging the protected metal.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101512490-B1
priorityDate 1997-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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