http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100269326-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-50 |
| filingDate | 1998-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcd2c374d0deb74624fd2b378b042770 |
| publicationDate | 2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100269326-B1 |
| titleOfInvention | Capacitor with electrode formed by electroplating and manufacturing method thereof |
| abstract | Disclosed are a capacitor having an electrode formed by electroplating and a manufacturing method thereof. In the present invention, a conductive layer is formed over the conductive plug connected to the active region of the semiconductor substrate and the interlayer insulating film formed around the conductive plug. An insulator pattern exposing a conductive layer on the conductive plug is formed on the conductive layer. The lower electrode is formed by selectively forming a platinum group metal film only on the exposed conductive layer by electroplating. In this method, the lower electrode can be formed such that its cross section is rectangular, T-shaped, inverted trapezoidal or jar-shaped. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100475402-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100646947-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100676534-B1 |
| priorityDate | 1998-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.