http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100268303-B1

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1007735376d07808ebe297f823b2829
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F2201-123
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136
filingDate 1997-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d3d9de29823ce38bc9ca065255bcea0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ac9f85afe19f8bbe958dff09d28aa03
publicationDate 2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100268303-B1
titleOfInvention LCD and its manufacturing method
abstract According to the present invention, a protective film 126 made of an organic material such as BCB is formed on a transparent substrate on which data bus lines, gate bus lines, and switching devices are formed.n n n The protective film is surface treated with O 2 plasma or the like for a predetermined time, and a primary ITO film is deposited on the protective film 126.n n n The primary ITO film and the protective film are wet-etched or dry-etched to form a contact hole so that a part of the drain electrode of the switching element is exposed.n n n A secondary ITO film is deposited on the entire surface of the substrate.n n n The secondary ITO film and the primary ITO film are etched by wet etching or the like to form the pixel electrode 104 on the passivation film 126.n n n Accordingly, in the present invention, since the surface of the protective film is not exposed to the etching gas during the etching process for forming the contact hole, the surface of the protective film is not caused by the etching gas and the pattern defect of the pixel electrode formed on the protective film does not occur.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100394556-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9488889-B2
priorityDate 1997-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 27.