http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100267201-B1

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-30
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-304
filingDate 1997-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c554a60d91d218d0140fbf55268b7d88
publicationDate 2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100267201-B1
titleOfInvention Vacuum Microdevices and Manufacturing Method Thereof
abstract The vacuum microdevice of the present invention includes a first electrode, an insulating film, and a second electrode. The first electrode protrudes in the current emitting region on the substrate. An insulating film is formed on the surface of the first electrode except for the tip of the first electrode. The second electrode is formed on the insulating film and has an electrode thickness that increases as it moves away from the tip of the first electrode.
priorityDate 1996-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 22.