| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06711 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate |
1997-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7c33b7a82eef7eaa00aa23ff4599ff0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d0f867f553408940aa74a81c02d32b6 |
| publicationDate |
2000-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100266759-B1 |
| titleOfInvention |
Probe card and its formation method |
| abstract |
The probe card includes the following elements. An insulating film is provided that is flexible and extends on the first surface of the substrate. The insulating film has a first surface in contact with the first surface of the substrate, thereby forming a defined spatial region between the first surface of the substrate and the first surface of the insulating film to allow a portion of the insulating film to move into space. The probe pattern extends onto the second surface of the insulating film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100580008-B1 |
| priorityDate |
1996-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |